|The AMI-3000/3300 achieve both high throughput and exceptional detection sensitivity.
Not only they replace visual macro inspection with automated macro inspection,
they also offer improved macro inspection accuracy as well as greater inspection quantization and clarity,
allowing more efficient process management
Nikon's diffracted light detection system detects pattern variations along the Z-axis, especially focus error and poor coating,with high sensitivity. In addition accuraterecognition of the diffracted light only from the top pattern layer is possible,
allowing defects in underlying patterns to be discriminated.
‧Detects particles (foreign materials) as small as 20 μm.
‧The entire surface of a wafer can be captured in a single image, achieving
‧A unique learning function utilizes AI image processing technology to
‧The versatile automatic recipe creation function allows even inexperienced
‧In addition to the Automatic Defect Classification (ADC) function, judgments.
‧Note: Hole process inspections are also supported.