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半導體檢測設備
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Mechatronic
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Edge Grip End-Effectors
Edge Grip End-Effectors
The edge grip end-effectors (mEG series) are designed for back side handling of MEMS wafers.
Types according to wafer size:
- 150 mm / 6” (end-effector mEG 150)
- 200 mm / 8” (end-effector mEG 200)
- 300 mm / 12” (end-effector mEG 300) - multi gripper, special design
- 450 mm / 18” (end-effector mEG 450) - special design
Function:
Edge grip end-effectors enable direct handling of wafers with two flats (primary and secondary flat). The alignment of the wafer is not important for the handling procedure. The edge grip end-effector touches the wafer only at the edge exclusion. The process area is safe.
An adapter for special applications is available, including:
- Mapping sensor
- Capacitive Sensor
- Speed regulator for clamping
- etc.
Features:
- Wafer sizes: 150 mm (6"), 200 mm (8"), 300 mm (12"), 450 mm (18")
- MEMS wafer handling
- Back side handling at the edge
- Conductive PEEK coating
- Automated quick coupling or adapter
- Automated loading and unloading of several mechatronic components