Edge Grip End-Effectors

The edge grip end-effectors (mEG series) are designed for back side handling of MEMS wafers.

Types according to wafer size:

• 150 mm / 6” (end-effector mEG 150)
• 200 mm / 8” (end-effector mEG 200)
• 300 mm / 12” (end-effector mEG 300) - multi gripper, special design
• 450 mm / 18” (end-effector mEG 450) - special design

Function:

Edge grip end-effectors enable direct handling of wafers with two flats (primary and secondary flat). The alignment of the wafer is not important for the handling procedure. The edge grip end-effector touches the wafer only at the edge exclusion. The process area is safe.

An adapter for special applications is available, including:

• Mapping sensor
• Capacitive Sensor
• Speed regulator for clamping
• etc.

Features:

• Wafer sizes: 150 mm (6"), 200 mm (8"), 300 mm (12"), 450 mm (18")
• MEMS wafer handling
• Back side handling at the edge
• Conductive PEEK coating
• Automated quick coupling or adapter
• Automated loading and unloading of several mechatronic components

Product Images

 

Product Datasheets

 End-Effector accessory_1109.pdf

 mechatronic Edge Grip End-Effector_1109.pdf