Ring Remover mRR 200
The Ring Remover mRR 200 enables fully automated removal of rings from laminated 200 mm (8") wafers on film frames.
The mRR 200 comes with two cassette ports for 8” wafers on film frames, a dual-arm-robot, two customized frame end-effectors 8" with mapping function, two ring remover stations 8", two camera units and two UV-modules, as well as a touch screen. Optionally it can be equipped with a 300 mm (12") conversion-kit.
- Film frame size: for 200 mm (8") or optional 300 mm (12") wafers
- Automated ring removing from wafers on film frames
- Optimized footprint
- Throughput of up to 45 wafers on film frames/hour (standard layout with two ring remover stations)
- 300 mm (12") conversion-kit optional
- Barcode reader for frame ID optional
- FFU for better cleanroom class optional
- Cleanroom class 6 (ISO EN 14 644-1)
- CE certificated
- SEMI standard compliant
- UPS (uninterruptible power supply) optional