Wafer Loader mWL 300

The Wafer Loader mWL 300 is designed for fully automated loading and unloading of 300 mm (12") standard wafers or e.g. eWLB wafers from FOUPs/FOSBs onto an external chuck.

The mWL 300 comes with two load ports, a single-arm-robot on a linear track and an appropriate end-effector. Optional it can be equipped with a pre-aligner, a customized external chuck and a RFID reader for FOUP / FOSB detection, as well as with a 200 mm (8") conversion-kit.

The adaptation to OEM tools according to customer requirements is possible.


  • Wafer size: 300 mm (12") or optional 200 mm (8")
  • Loading and unloading of a chuck
  • Handling of standard- or e.g. eWLB wafers
  • Handling of warped wafers
  • Optimized footprint
  • Standard FOUP or FOSB compliant
  • 200 mm (8") conversion kit optional
  • RFID reader for FOUP- / FOSB-ID optional
  • OCR reader for wafer ID optional
  • FFU for better cleanroom class optional
  • Cleanroom class 5 (ISO EN 14 644-1)
  • CE certificated
  • SEMI standards compliant
  • UPS (uninterruptible power supply) optional

Product Images

Product Datasheets

pdf document mechatronic Wafer Loader_300_V3.0_2012.pdf


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