Edge Grip End-Effectors

The edge grip end-effectors (mEG series) are designed for back side handling of MEMS wafers.

Types according to wafer size:

  • 150 mm / 6” (end-effector mEG 150)
  • 200 mm / 8” (end-effector mEG 200)
  • 300 mm / 12” (end-effector mEG 300) - multi gripper, special design
  • 450 mm / 18” (end-effector mEG 450) - special design

Function:

Edge grip end-effectors enable direct handling of wafers with two flats (primary and secondary flat). The alignment of the wafer is not important for the handling procedure. The edge grip end-effector touches the wafer only at the edge exclusion. The process area is safe.

An adapter for special applications is available, including:

  • Mapping sensor
  • Capacitive Sensor
  • Speed regulator for clamping
  • etc.

Features:

  • Wafer sizes: 150 mm (6"), 200 mm (8"), 300 mm (12"), 450 mm (18")
  • MEMS wafer handling
  • Back side handling at the edge
  • Conductive PEEK coating
  • Automated quick coupling or adapter
  • Automated loading and unloading of several mechatronic components

 

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