Cassettes

The Cassettes (mCA series) are designed for storing all types of 150/200 mm (6"/8") wafers or rather for their transport between several process steps. Each cassette type is available in different customized designs.

★Features:

  • anodized aluminum

  • polished surface

  • applicable to vacuum

  • PEEK stops

  • temperature resistance up to 155°C

  • side slit (e.g. for scanning)

  • SEMI standards compliant

Optional the cassettes are available with a carrying handle, one or two H-bars and hard coated surface.

ASK FOR YOUR CUSTOMIZED SOLUTION!

Product Imges

Cassette mCA 200 with 25 slots, for 8

Product Datasheets

pdf document mechatronic Cassettes 150_200.pdf



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