The Cassettes (mCA series) are designed for storing all types of 150/200 mm (6"/8") wafers or rather for their transport between several process steps. Each cassette type is available in different customized designs.
applicable to vacuum
temperature resistance up to 155°C
side slit (e.g. for scanning)
SEMI standards compliant
Optional the cassettes are available with a carrying handle, one or two H-bars and hard coated surface.
ASK FOR YOUR CUSTOMIZED SOLUTION!