Wafer Sorter mWS 150 / 200
Wafer Sorter mWS 150 / 200

Wafer Sorter mWS 150 / 200

The Wafer Sorter mWS 150 / 200 is designed for sorting,(mass)transfering,splitting or merging of 150mm(6”)and 200mm(8”)thin and warped wafers in one machine and can be equipped with up to six cassettes.The mWS 150 / 200 continuously monitors all wafers in the cassette before and during the whole work process and verifies the compatibility of wafer and end - effector size.
The mWS 150 / 200 comes with two scanners(each for up to three cassettes),a dual - arm - robot,Bernoulli vacuum end - effectors,a pre - aligner and an automated end - effector change station,as well as an end - effector cleaner.Optionally it can be equipped with other end - effectors(e.g. Top Grip or Batch)and a green light visual inspection module.

Features

• Wafer sizes:150mm(6”)and 200mm(8”)
• Sorting of two wafer sizes in one machine
• Handling of warped wafers
• Optimized footprint
• Automated changing and cleaning of end - effectors
• Green light visual inspection optional
• OCR reader for wafer ID optional
• FFU for better cleanroom class optional
• Cleanroom class 5(ISO EN 14 644 - 1)
• CE certificated
• SEMI standards compliant
• UPS(uninterruptible power supply)optional
服務據點
台北總公司
105台北市松山區南京東路三段272號8樓
Tel:(02) 2740-3366
Fax:(02) 2773-5577
新竹分公司
300新竹市東區關新路27號15樓之2
Tel:(03) 564-1360
Fax:(03) 564-1363
台中分公司
406台中市北屯區文心路四段450號
Tel:(04) 2230-0077
Fax:(04) 2230-0055
台南分公司
744台南市新市區光明街82號
Tel:(06) 589-1721
Fax:(06) 589-1728
高雄分公司
806高雄市前鎮區民權二路8號12樓之2
Tel:(07) 537-3990
Fax:(07) 537-3880