Wafer Sorter mWS 200 / 300t
Wafer Sorter mWS 200 / 300t

Wafer Sorter mWS 200 / 300t

The Wafer Sorter mWS 200 / 300t is designed for sorting,transfering,splitting or(manual)green light visual inspection of 200mm(8”)and 300mm(12”)thin and warped wafers in one machine and can be equipped with up to four cassettes or FOUPs(mixed loading)possible.The mWS 200 / 300 handles wafers out of a cassette / FOUP onto a pre - aligner,forward onto a visual inspection unit and back into a cassette / FOUP.
The mWS 200 / 300t comes with four(FOUP)load ports,four adapter palates for 8" cassettes,a dual - arm - robot,two Bernoulli vacuum end - effectors with mapping - & flipping function(compatible for 8" and 12" wafers without end - effector exchange),a pre - aligner and a green light visual inspection module.Optionally it can be equipped with a wafer - ID reader,a RFID reader,a camera for handling area monitoring and an ionizer.

Features

• Wafer sizes:200mm(8”)and 300mm(12”)
• Sorting of two wafer sizes in one machine
• Handling of standard,TAIKO,thin and warped wafers
• Optimized footprint
• Highest product and operator safety
• High throughput(up to 201 wafers / hour)
• End - effectors with mapping function
• Wafer flipping function
• Green light visual inspection via joystick and defect marking on touch panel
• Wafer - ID reader for barcode,OCR,data matrix code,T7 optional
• RFID reader for FOUP - / cassette - ID optional
• SECS / GEM optional
• Integrated FFU for better cleanroom class optional
• UPS(uninterruptible power supply)optional
• Cleanroom class 5(ISO EN 14 644 - 1)
• CE certificated
• SEMI standards compliant 
服務據點
台北總公司
105台北市松山區南京東路三段272號8樓
Tel:(02) 2740-3366
Fax:(02) 2773-5577
新竹分公司
300新竹市東區關新路27號15樓之2
Tel:(03) 564-1360
Fax:(03) 564-1363
台中分公司
406台中市北屯區文心路四段450號
Tel:(04) 2230-0077
Fax:(04) 2230-0055
台南分公司
744台南市新市區光明街82號
Tel:(06) 589-1721
Fax:(06) 589-1728
高雄分公司
806高雄市前鎮區民權二路8號12樓之2
Tel:(07) 537-3990
Fax:(07) 537-3880