Wafer Loader mWL 150 / 200t
Wafer Loader mWL 150 / 200t

Wafer Loader mWL 150 / 200t

The Wafer Loader mWL 150 / 200t is designed for fully automated loading and unloading of 150 / 200mm(6" / 8")thin - wafers from cassettes onto an external chuck for visual inspection. 
The mWL 150 / 200t comes with a dual - arm - robot(with flip box optional),a combination of Bernoulli vacuum - and top grip end - effectors,two cassette stations with scanners,a pre - aligner,an end - effector change station,a transfer station(for storing a wafer while taking a different end - effector for further process)incl.an end - effector cleaner,as well as a touch screen.Optionally it can individually be equipped with a wafer flipping function and a customized external chuck.
The adaptation to OEM tools according to customer requirements is possible.

Features

• Wafer sizes:150mm(6")and 200mm(8")
• Handling of two wafer sizes in one machine
• Loading and unloading of a chuck
• Handling of e.g. thin - wafers > 50µm(1,97mil)
• Handling of warped wafers
• Chip side and back side handling
• Optimized footprint
• Flip box optional
• Automated end - effector change after wafer size change
• Automated end - effector cleaning after end-effector change
• OCR reader for wafer ID optional
• FFU for better cleanroom class optional
• Cleanroom class 5(ISO EN 14 644 - 1)
• CE certificated
• SEMI standard compliant
• UPS(uninterruptible power supply)optional
服務據點
台北總公司
105台北市松山區南京東路三段272號8樓
Tel:(02) 2740-3366
Fax:(02) 2773-5577
新竹分公司
300新竹市東區關新路27號15樓之2
Tel:(03) 564-1360
Fax:(03) 564-1363
台中分公司
406台中市北屯區文心路四段450號
Tel:(04) 2230-0077
Fax:(04) 2230-0055
台南分公司
744台南市新市區光明街82號
Tel:(06) 589-1721
Fax:(06) 589-1728
高雄分公司
806高雄市前鎮區民權二路8號12樓之2
Tel:(07) 537-3990
Fax:(07) 537-3880