Wafer Loader mWL 200

The Wafer Loader mWL 200 is designed for fully automated loading and unloading of 200 mm (8") standard wafers or e.g. eWLB wafers from cassettes onto an external chuck for visual inspection.

The mWL 200 comes with two cassette ports, a single-arm-robot and an approriate end-effector. Optional it can be equipped with a pre-aligner, a customized external chuck and a microscope table.

The adaptation to OEM tools according to customer requirements is possible.

Features:

  • Wafer size: 200 mm (8”)
  • Loading and unloading of a chuck
  • Handling of standard- or e.g. eWLB wafers
  • Handling of warped wafers
  • Optimized footprint
  • OCR reader for wafer ID optional
  • FFU for better cleanroom class optional
  • Cleanroom class 5 (ISO EN 14 644-1)
  • CE certificated
  • SEMI standards compliant
  • UPS (uninterruptible power supply) optional

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