Wafer Loader mWL 300
Wafer Loader mWL 300

Wafer Loader mWL 300

The Wafer Loader mWL 300 is designed for fully automated loading and unloading of 300mm(12")standard wafers or e.g.eWLB wafers from FOUPs / FOSBs onto an external chuck.
The mWL 300 comes with two load ports,a single - arm - robot on a linear track and an appropriate end - effector. Optional it can be equipped with a pre - aligner,a customized external chuck and a RFID reader for FOUP / FOSB detection,as well as with a 200mm(8")conversion - kit.
The adaptation to OEM tools according to customer requirements is possible.

Features

• Wafer size:300mm(12")or optional 200mm(8")
• Loading and unloading of a chuck
• Handling of standard - or e.g.eWLB wafers
• Handling of warped wafers
• Optimized footprint
• Standard FOUP or FOSB compliant
• 200mm(8") conversion kit optional
• RFID reader for FOUP - / FOSB - ID optional
• OCR reader for wafer ID optional
• FFU for better cleanroom class optional
• Cleanroom class 5(ISO EN 14 644 - 1)
• CE certificated
• SEMI standards compliant
• UPS(uninterruptible power supply)optional

Product Images

Wafer Loader mWL 300

服務據點
台北總公司
105台北市松山區南京東路三段272號8樓
Tel:(02) 2740-3366
Fax:(02) 2773-5577
新竹分公司
300新竹市東區關新路27號15樓之2
Tel:(03) 564-1360
Fax:(03) 564-1363
台中分公司
406台中市北屯區文心路四段450號
Tel:(04) 2230-0077
Fax:(04) 2230-0055
台南分公司
744台南市新市區光明街82號
Tel:(06) 589-1721
Fax:(06) 589-1728
高雄分公司
806高雄市前鎮區民權二路8號12樓之2
Tel:(07) 537-3990
Fax:(07) 537-3880