Wafer Loader mWL 300
The Wafer Loader mWL 300 is designed for fully automated loading and unloading of 300 mm (12") standard wafers or e.g. eWLB wafers from FOUPs/FOSBs onto an external chuck.
The mWL 300 comes with two load ports, a single-arm-robot on a linear track and an appropriate end-effector. Optional it can be equipped with a pre-aligner, a customized external chuck and a RFID reader for FOUP / FOSB detection, as well as with a 200 mm (8") conversion-kit.
The adaptation to OEM tools according to customer requirements is possible.
- Wafer size: 300 mm (12") or optional 200 mm (8")
- Loading and unloading of a chuck
- Handling of standard- or e.g. eWLB wafers
- Handling of warped wafers
- Optimized footprint
- Standard FOUP or FOSB compliant
- 200 mm (8") conversion kit optional
- RFID reader for FOUP- / FOSB-ID optional
- OCR reader for wafer ID optional
- FFU for better cleanroom class optional
- Cleanroom class 5 (ISO EN 14 644-1)
- CE certificated
- SEMI standards compliant
- UPS (uninterruptible power supply) optional