Nikon VMZ-K3040 & VMZ-K6555 共軛焦影像測量系統

Simultaneous wide-area height measurements with confocal optics and 2D measurement with 15× brightfield zoom optics.

 
VMZ-K3040
VMZ-K6555
XY Stroke (mm)
300×400
650×550
Magnication (Type S)
1.5× / 3× / 7.5×
1.5× / 3× / 7.5×
Magnication (Type H)
15× / 30×
15× / 30×
Z-axis Stroke (mm)
150
150
Max. guaranteed loading capacity (kg)
20
30
Max. permissible error U1X, U1Y (µm)
1.5+2.5L / 1000
1.5+2.5L / 1000
Max. permissible error of Z axis (µm)
1+L / 1000
1+L / 1000
Zoom Heads

Confocal NEXIV incorporates confocal optics for fast and accurate evaluation of fine three-dimensional geometries.

Confocal Optics are designed for wide FOV height measurement.
  • High Contrast and Multileveled Sample (PCBs)

Brightfield observation can sometimes be difficult due to blurred lines along sample structure. These lines can be clearly observed and measured using Confocal optics. 

  • Thin Transparent Samples (Metal Surface Film / Semiconductor Resist)

Top layers of both thin transparent film and metal surface can be easily detected using Confocal optics.



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