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國祥引進新品 -- Mechatronic半導體檢測設備

Mechatronic 專精於 thin & Major business fields

Mechatronic 成立於1998年,製造總部設於奧地利,2011年由國祥貿易正式引進,為台灣的半導體檢測設備,帶進新的技術整合與應用。Mechatronic開發出可結合Nikon 2.5D自動量測系統VMR系列,應用在 eWLB/Thin wafer的全自動高精度量測。

Mechatronic全產品介紹

The challenge & requirement 
… to handle different/critical types of 150, 200 and 300mm wafer

Series of special end-effectors
to meet with customer specific wafer requirements

Scanner

Special scanning system
to allocate and measure exact position of every wafer in any cassette type

Wafer Mapping

Important

continuing scanning cycles to verify exact wafer allocation (to avoid any damage)

Chip side handling?
• … the challenge

- handling on the chip side without contact

Top grip end-effector
e.g. for chip side handling from pre-aligner onto process chuck

mWL300- wafer loader with Non-Contact 2.5D(X,Y,Z Axis)Auto measurement system

Features

1. Available for 8 "and 12" wafer
2. eWLB/Thin wafer ,available for large warpage wafer handle
3. Option for FFU/SECS GEM/RFID/OCR
4. High accuracy of 2.5D (XYZ axis)Auto measurement : Die shift, wafer warpage....

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