• APPLICATION FOR ADI/AEI/AFI/ASI
• • ADI ： Inspection after Developing
• • AEI ： Inspection after Etching
• • AFI ： Inspection after Furnace
• • AS I ： Inspection after Sputtering
• Resolution:0.18 μ m
• INDEXER(OPTION)
• GEM/SECS II(OPTION)
• MICRO/MACRO/BACK-SIDE MACRO INSPECTION AVAILABLE
• NON-CONTACT PRE-ALIGN
• ERGONOMIC DESIGN |
