FOUP Measureing / VMR4540C

When wafer load and unload ;robot arm hit or scrape wafer not only check robot arm position;
It always have very high percentage comes from Cassette or FOUP damage.Nikon C-4540 provide you
high accurancy to check your Cassette reliability reduce wafers risk

Overview

•"Available for FOUP, FOSB, 6"",8"" open cassette,Reticle cassette "

•Non-contact dimension measurements by Video measuring and Laser AF

•enables to measure the carrier from 4 direction (Front/Rear/Right/Left)

•RFID and FOUP auto door is available

•Measure experience Entegris, Miraial, Shinetsu, Vantec, Dainichi….

•Throughput higher then competed 30% save fab cost

•Lowest C.O.O. consumer parts only halogen lamp saving fab running cost
 
聯絡資料

新竹:03-5641360
台中:04-24637816
台南:06-5891721
E-Mail:sylvia_lee@ticgroup.com.tw