Auto wafer warpage and die shift measuring system
Excellent auto loading system Integrated Nikon high accurancy measurement system ,Achievement ultra wafer loading and measuring

Overview

•Available for 12" and 8" wafer warpage and die shift measurement by fully auto
•Available for resin wafer (eWLB) glass wafer and ultra wapage wafer loading and measuring
•Maxima wafer wapage tolerance 8" +/- 2000um;12" +/- 4mm
•Enclosure with FFU,SECS/GEM,Wafer OCR are available for option
•3 type magnification selectable

•Available for customize auto loading system
 
聯絡資料

新竹:03-5641360
台中:04-24637816
台南:06-5891721
E-Mail:sylvia_lee@ticgroup.com.tw