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全球唯一8"&12"共用晶圓檢查系統 Nikon OST3000
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| Apply to: Front End OQA,Bumping,Testing,Assembly IQA Department Features: |
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| 1.Available FOUP/FOSB and 200mm OPEN Cassettes | |||
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| 2. Road port and High accurancy Robot unit 3. 3 kinds macro inspection |
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| 4.Wide lighting area covers whole inspection area for 12” wafer "Macro F" | |||
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| 5.Available for Bow wafer inspection 6.Available for Thin wafer inspection 7.High resolution Macro capture function |
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| 8. Z axis measurement is available( example:bump high and particle ) 9. High Throughput :15% faster then competed 10. 5 million pixes digital CCD camera with measurement software |
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