Packing Tool mPT 150 / 200
Packing Tool mPT 150 / 200

Packing Tool mPT 150 / 200

The Packing Tool mPT 150 / 200 is designed for packing and unpacking of 150mm(6”)and 200mm(8”)wafers by using contactless end - effectors(mCL series).
The mPT 150 / 200 comes with a dual - arm - robot,contactless end - effectors for 6" / 8" wafers,wafer flipping function,two cassette stations with scanner for 6" / 8" cassettes,a pre - aligner,a packing chuck and a packing module containing five stations for shipping boxes and packing material,as well as a touch screen.Optionally it can be equipped with a green light visual inspection module.

Features

• Wafer sizes:150mm(6”)and 200mm(8”)
• Packing and unpacking of e.g.thin - wafers
• Handling of warped wafers
• Optimized footprint
• High throughput
• Cassette scanning
• Green light visual inspection optional
• OCR reader for wafer ID optional
• FFU for better cleanroom class optional
• Cleanroom class 6(ISO EN 14 644 - 1)
• CE certificated
• SEMI standard compliant
• UPS(uninterruptible power supply)optional
服務據點
台北總公司
105台北市松山區南京東路三段272號8樓
Tel:(02) 2740-3366
Fax:(02) 2773-5577
新竹分公司
300新竹市東區關新路27號15樓之2
Tel:(03) 564-1360
Fax:(03) 564-1363
台中分公司
406台中市北屯區文心路四段450號
Tel:(04) 2230-0077
Fax:(04) 2230-0055
台南分公司
744台南市新市區光明街82號
Tel:(06) 589-1721
Fax:(06) 589-1728
高雄分公司
806高雄市前鎮區民權二路8號12樓之2
Tel:(07) 537-3990
Fax:(07) 537-3880