Ring Remover mRR 200
Ring Remover mRR 200

Ring Remover mRR 200

The Ring Remover mRR 200 enables fully automated removal of rings from laminated 200 mm(8")wafers on film frames.
The mRR 200 comes with two cassette ports for 8” wafers on film frames,a dual - arm - robot,two customized frame end - effectors 8" with mapping function, two ring remover stations 8",two camera units and two UV - modules,as well as a touch screen.Optionally it can be equipped with a 300mm(12")conversion - kit.

Features

• Film frame size:for 200mm(8")or optional 300mm(12")wafers
• Automated ring removing from wafers on film frames
• Optimized footprint
• Throughput of up to 45 wafers on film frames / hour(standard layout with two ring remover stations)
• 300mm(12")conversion-kit optional
• Barcode reader for frame ID optional
• FFU for better cleanroom class optional
• Cleanroom class 6(ISO EN 14 644 - 1)
• CE certificated
• SEMI standard compliant
• UPS(uninterruptible power supply)optional
服務據點
台北總公司
105台北市松山區南京東路三段272號8樓
Tel:(02) 2740-3366
Fax:(02) 2773-5577
新竹分公司
300新竹市東區關新路27號15樓之2
Tel:(03) 564-1360
Fax:(03) 564-1363
台中分公司
406台中市北屯區文心路四段450號
Tel:(04) 2230-0077
Fax:(04) 2230-0055
台南分公司
744台南市新市區光明街82號
Tel:(06) 589-1721
Fax:(06) 589-1728
高雄分公司
806高雄市前鎮區民權二路8號12樓之2
Tel:(07) 537-3990
Fax:(07) 537-3880