Nikon Auto wafer warpage and die shift measuring system

Excellent auto loading system Integrated Nikon high accurancy measurement system ,Achievement ultra wafer loading and measuring

Available for customize auto loading system


‧Available for 12" and 8" wafer warpage and die shift measurement by fully auto 
‧Available for resin wafer (eWLB) glass wafer and ultra wapage wafer loading and measuring 
‧Maxima wafer wapage tolerance 8" +/- 2000um;12" +/- 4mm 
‧Enclosure with FFU,SECS/GEM,Wafer OCR are available for option 
‧3 type magnification selectable


* 必填欄位
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