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Mechatronic 專精於 thin & Major business fields

國祥引進新品 -- Mechatronic半導體檢測設備

Mechatronic 專精於 thin & Major business fields

Mechatronic 成立於1998年,製造總部設於奧地利,2011年由國祥貿易正式引進,為台灣的半導體檢測設備,帶進新的技術整合與應用。Mechatronic開發出可結合Nikon 2.5D自動量測系統VMR系列,應用在 eWLB/Thin wafer的全自動高精度量測。

Mechatronic全產品介紹

Mechatronic 專精於 thin & Major business fields

The challenge & requirement 
… to handle different/critical types of 150, 200 and 300mm wafer

Mechatronic 專精於 thin & Major business fields

Series of special end-effectors
to meet with customer specific wafer requirements

Mechatronic 專精於 thin & Major business fields

Scanner

Special scanning system
to allocate and measure exact position of every wafer in any cassette type

Mechatronic 專精於 thin & Major business fields

Wafer Mapping

Important

continuing scanning cycles to verify exact wafer allocation (to avoid any damage)

Mechatronic 專精於 thin & Major business fields

Chip side handling?
• … the challenge

- handling on the chip side without contact

Mechatronic 專精於 thin & Major business fields

Top grip end-effector
e.g. for chip side handling from pre-aligner onto process chuck

mWL300- wafer loader with Non-Contact 2.5D(X,Y,Z Axis)Auto measurement system

Mechatronic 專精於 thin & Major business fields

Features

1. Available for 8 "and 12" wafer
2. eWLB/Thin wafer ,available for large warpage wafer handle
3. Option for FFU/SECS GEM/RFID/OCR
4. High accuracy of 2.5D (XYZ axis)Auto measurement : Die shift, wafer warpage....

洽詢電話: (03)564-1360 #205 葉小姐
聯絡時間: 週一 ~ 週五 9:00a.m-5:00pm

服務據點
台北總公司
105台北市松山區南京東路三段272號8樓
Tel:(02) 2740-3366
Fax:(02) 2773-5577
新竹分公司
300新竹市東區關新路27號15樓之2
Tel:(03) 564-1360
Fax:(03) 564-1363
台中分公司
406台中市北屯區文心路四段450號
Tel:(04) 2230-0077
Fax:(04) 2230-0055
台南分公司
744台南市新市區光明街82號
Tel:(06) 589-1721
Fax:(06) 589-1728
高雄分公司
806高雄市前鎮區民權二路8號12樓之2
Tel:(07) 537-3990
Fax:(07) 537-3880